Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-12-08
2008-03-18
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S213000, C438S401000, C414S936000
Reexamination Certificate
active
07346415
ABSTRACT:
The intensity of light of a predetermined wavelength corresponding to the type of a protective tape joined to the surface of a semiconductor wafer is adjusted by a controller, and a holding stage for holding the semiconductor wafer is scanned rotationally. At this time, at a V notch portion for positioning formed in the semiconductor wafer, light is transmitted through the protective sheet covering the surface, which is received by a photoreception sensor. Based on the change in the reception amount of light in the photoreception sensor, the position of a detection site is specified.
REFERENCES:
patent: 5644400 (1997-07-01), Mundt
patent: 5822213 (1998-10-01), Huynh
patent: 8-279547 (1996-10-01), None
patent: 2003-258062 (2003-09-01), None
Ikeda Satoshi
Yamamoto Masayuki
Cheng Law Group PLLC
Garland Steven R.
Nitto Denko Corporation
Picard Leo
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