Semiconductor wafer pick-up device

Details Semiconductor wafer pick-up device Semiconductor wafer pick-up device

1988-12-20

1990-10-02

Cherry, Johnny D.

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

294 864, 901 40, 901 45, 29743, B25J 1506

Patent

active

049602985

ABSTRACT:
The invention is a device for picking-up a semiconductor wafer without using the edges of the wafer thereby eliminating stress to the wafer. The picker moves up and down within a robotic arm and comes to rest in the same location each time through the use of tapered posts.

REFERENCES:
patent: 4557514 (1985-12-01), Cushman et al.
patent: 4600228 (1986-07-01), Tarbuck
patent: 4648588 (1987-03-01), Carrell
patent: 4720130 (1988-01-01), Andou
patent: 4763941 (1988-08-01), Sniderman
patent: 4768919 (1988-09-01), Borgman et al.

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