Semiconductor wafer orientation device

Details Semiconductor wafer orientation device Semiconductor wafer orientation device

1988-12-20

1991-10-01

Bucci, David A.

Material or article handling

Article reorienting device

Article frictionally engaged and rotated by relatively...

198394, 414786, B65G 4724

Patent

active

050528866

ABSTRACT:
A device having a circled array of tapered motor driven rollers center and find the flat edge of a semiconductor wafer by rotating the wafer until the flat edge is over a photo cell, at which time finder rollers secure the wafer in its centered and orientated position.

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patent: 4887904 (1989-12-01), Nakazato et al.
patent: 4892455 (1990-01-01), Hine

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