Semiconductor wafer lifter

Details Semiconductor wafer lifter Semiconductor wafer lifter

2005-03-01

2010-06-08

Barr, Michael (Department: 1792)

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

C134S902000, C156S345110, C156S345230, C156S345510, C156S345540, C118S428000, C204S285000

Reexamination Certificate

active

07730898

ABSTRACT:
A novel semiconductor wafer lifter is disclosed for handling wafers during wet bench processing. In particular, the lifter has a plurality of holes formed in its vertical support surface to allow cleaning or rinsing fluid to flow through the vertical support instead of around its sides. These holes facilitates a constant flow of fluid across the wafer during recirculation of the tank contents during etching and rinsing operations, thus ensuring more even etching of all wafers and minimizing the deposition of particulate matter on wafer surfaces.

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