Semiconductor wafer inspection apparatus

Details Semiconductor wafer inspection apparatus Semiconductor wafer inspection apparatus

2008-04-04

2009-12-15

Hollington, Jermele M (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07633303

ABSTRACT:
Efficiency of a charging processing of an insulator sample is improved. And, an electron optical system is adjusted according to a contact resistance value of the insulator sample. Breakdown of a sample is performed before the charging processing, and then, the charging processing is performed. A control parameter of the electron optical system is selected using a result of a resistance value of the sample for checking the breakdown.

REFERENCES:
patent: 4460866 (1984-07-01), Feuerbaum et al.
patent: 4695794 (1987-09-01), Bargett et al.
patent: 4851768 (1989-07-01), Yoshizawa et al.
patent: 5097204 (1992-03-01), Yoshizawa et al.
patent: 6002792 (1999-12-01), Oguri et al.
patent: 6329826 (2001-12-01), Shinada et al.
patent: 6344750 (2002-02-01), Lo et al.
patent: 6583634 (2003-06-01), Nozoe et al.
patent: 6859060 (2005-02-01), Neo et al.
patent: 2006/0054813 (2006-03-01), Nokuo et al.
patent: 2006/0097165 (2006-05-01), Ando et al.
patent: 3-194915 (1991-08-01), None
patent: 2006-013049 (2006-01-01), None

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