Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2006-03-13
2010-11-16
Van, Luan V (Department: 1795)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S297010
Reexamination Certificate
active
07833393
ABSTRACT:
A semiconductor wafer holder includes first and second holding members between which a semiconductor wafer is held. The second holding member includes a second conductive element placed in contact with a first conductive element of the first holding member and the semiconductor wafer. A ring clamp is used to press the second holding member against the first holding member for holding of the semiconductor wafer.
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Journal Ebara, vol. 181 (Oct. 1998), “Summary of the Plating Apparatus”, pp. 42-49 (with English translation).
Mukaiyama Yoshitaka
Yoshioka Junichiro
Ebara Corporation
Van Luan V
Wenderoth , Lind & Ponack, L.L.P.
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