Semiconductor wafer having machine readable indicies

Registers – Calculators – Input-output calculator to indicator – printer – etc.

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250566, G06K 710, G08C 906

Patent

active

040103552

ABSTRACT:
Machine readable identifying indices for a semiconductor wafer having a top surface, a bottom surface, and at least one flat edge is placed on the bottom surface of the semiconductor wafer, positioned in a predetermined relationship to the flat edge, desirably parallel to the flat edge. Means is provided for directing a first beam of radiant energy at the machine readable code and a second beam of radiant energy at the semiconductor wafer proximate to the machine readable code. Sensing means detects the first and second beams after impinging on the semiconductor wafer. A differential amplifier produces a series of output pulses representing the machine readable code. The output from the sensing means constitutes the inputs to the differential amplifier. In a preferred form, the machine readable code is a bar code including error check symbols. This approach gives a simplified means for identifying semiconductor wafers that is highly reliable.

REFERENCES:
patent: 2952008 (1960-09-01), Mitchell et al.
patent: 3609306 (1971-09-01), Langley
patent: 3673389 (1972-06-01), Kapsambelis et al.
patent: 3761725 (1973-09-01), Meyer

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