Semiconductor wafer having a multitude of sensor elements...

Details Semiconductor wafer having a multitude of sensor elements... Semiconductor wafer having a multitude of sensor elements...

2011-01-18

2011-01-18

Nguyen, Ha Tran T (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S765010, C324S1540PB, C073S723000

Reexamination Certificate

active

07872487

ABSTRACT:
In the measurement of sensor elements in a wafer composite, whereby non-electric stimuli are to be applied to the sensor elements, a semiconductor wafer having a multitude of sensor elements, each sensor element having a voltage supply connection, a grounded connection, and at least one sensor signal output, is configured such that a bus system is integrated in the semiconductor wafer, to which bus system at least the grounded connections of the sensor elements are connected and via which a supply voltage may be applied to the sensor elements, and that each sensor element is equipped with at least one controllable switching element for selecting the sensor element, so that only a selected sensor element supplies a sensor signal to a diagnosis device.

REFERENCES:
patent: 4140965 (1979-02-01), Neal
patent: 6142021 (2000-11-01), Ross et al.
patent: 6771089 (2004-08-01), Wilcox
patent: 6930499 (2005-08-01), Van Arendonk et al.
patent: 2003/0043015 (2003-03-01), Gershfeld
patent: 696 33 713 (2002-02-01), None
patent: 0 786 667 (1997-07-01), None

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