Semiconductor wafer handling system

Details Semiconductor wafer handling system Semiconductor wafer handling system

1999-12-16

2000-11-21

Scherbel, David A.

Abrading

Abrading process

451331, 451339, 451333, B24B 700

Patent

active

061494984

ABSTRACT:
A unidirectional gate disposed between interconnecting fluid transport regions in a manufacturing process. The gate allows workpieces to pass from a first transport region to a second transport region but prevents them from returning to the first region after having passed into the second region. The gate may specifically be used in semiconductor wafer manufacturing, especially where wafers exit a water track into a cassette.

REFERENCES:
patent: 951754 (1910-03-01), Buzzell et al.
patent: 1684370 (1928-09-01), Schuster
patent: 2819122 (1958-01-01), Scheider
patent: 3115369 (1963-12-01), Bozich
patent: 3490812 (1970-01-01), Uchida
patent: 4348139 (1982-09-01), Hassan et al.
patent: 4971481 (1990-11-01), Foreman
patent: 4990047 (1991-02-01), Wagner et al.
patent: 5213451 (1993-05-01), Frank et al.
patent: 5226758 (1993-07-01), Tanaka et al.
patent: 5478195 (1995-12-01), Usami
patent: 5628828 (1997-05-01), Kawamura et al.
patent: 5634636 (1997-06-01), Jackson et al.
patent: 5733171 (1998-03-01), Allen et al.
patent: 5797789 (1998-08-01), Tanaka et al.
patent: 5827110 (1998-10-01), Yajima et al.
patent: 5830045 (1998-11-01), Togawa et al.
patent: 5893795 (1999-04-01), Perlov et al.
patent: 5906532 (1999-05-01), Nakajima et al.
patent: 5908347 (1999-06-01), Nakajima et al.
patent: 5975986 (1999-11-01), Allen et al.
patent: 6007411 (1999-12-01), Feeney

Affiliated with

Also associated with

Rating

Semiconductor wafer handling system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor wafer handling system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor wafer handling system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1252238