Semiconductor wafer grinder

Details Semiconductor wafer grinder Semiconductor wafer grinder

2006-03-14

2006-03-14

Wilson, Lee D. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With feeding of tool or work holder

C451S288000, C451S388000, C451S443000

Reexamination Certificate

active

07011567

ABSTRACT:
A grinder designed to provide an automatic grinding operation for the manufacture of a semiconductor device wafer. The grinder includes a base, a rotatable index table mounted to the base, and a grinding wheel assembly including a grinding wheel for grinding a flat surface on the wafer. The index table includes a wafer holder for receiving and holding the wafer and a dressing element for dressing the grinding wheel. The index table is selectively rotatable between a grinding position where the wafer is ground by the grinding wheel and a dressing position where the grinding wheel is dressed by the dressing element.

REFERENCES:
patent: 4583325 (1986-04-01), Tabuchi
patent: 4947598 (1990-08-01), Sekiya
patent: 5679060 (1997-10-01), Leonard et al.
patent: 5791976 (1998-08-01), Honda
patent: 5827112 (1998-10-01), Ball
patent: 6062954 (2000-05-01), Izumi
patent: 6159071 (2000-12-01), Koma et al.
patent: 6168499 (2001-01-01), Jang
patent: 6168683 (2001-01-01), Cesna
patent: 6332833 (2001-12-01), Ohshima et al.
patent: 6431949 (2002-08-01), Ishikawa et al.
patent: 6431964 (2002-08-01), Ishikawa et al.
patent: 6443818 (2002-09-01), Bent
patent: 6527627 (2003-03-01), Arai
patent: 6685542 (2004-02-01), Mori et al.
patent: 2002/0086623 (2002-07-01), Togawa et al.
patent: 2002/0160691 (2002-10-01), Ishikawa et al.
patent: 2003/0232581 (2003-12-01), Ki
G&N, Fully Automatic Mater Grinding with the Nanogrinder/4-300, catalog, unknown date, 4 pgs., printed in Germany.
G&N, Fully Automatic Wafer Grinder Multi-Nono/3-300, catalog, unknown date, 4 pgs., printed in Germany.
G&N, Precision. Economy. Reliability. The G&N Machine Program for semiconductor Production and Other Advanced Materials, unknown date, 16 pgs., printed in Germany.

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