Heating – Work feeding – agitating – discharging or conveying... – Having closure or seal for work feeder's entrance passage
Patent
1986-06-30
1987-09-08
Yuen, Henry C.
Heating
Work feeding, agitating, discharging or conveying...
Having closure or seal for work feeder's entrance passage
432250, 110173R, F27D 118
Patent
active
046921150
ABSTRACT:
A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube. The control system employs a selfteaching technique that permits rapid reprogramming of the carriage travel limits which may be required when the paddle is replaced by a paddle of a different type or length.
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Aldridge Robert E.
Elloway Russell
Fritz William O.
Goff Ralph D.
Herrera Michael J.
Thermco Systems, Inc.
Valentine James C.
Williamson John K.
Yuen Henry C.
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