Semiconductor wafer examination method and semiconductor...

Details Semiconductor wafer examination method and semiconductor... Semiconductor wafer examination method and semiconductor...

2007-07-10

2009-10-06

Nguyen, Ha Tran T (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C324S765010, C438S014000

Reexamination Certificate

active

07598730

ABSTRACT:
A semiconductor wafer examination method that includes: preparing a wafer formed with a chip area for use as a semiconductor chip; firstly examining the wafer by probing; pressing an electrode of the wafer with a pressure member having a flat surface; and secondly examining the wafer by probing.

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