Semiconductor wafer end effector

Details Semiconductor wafer end effector Semiconductor wafer end effector

1993-09-22

1995-07-04

Ramirez, Ramon O.

Supports: racks

Special article

Platelike

A47F 700

Patent

active

054292514

ABSTRACT:
An end effector for holding or carrying semiconductor wafers during wet processing is disclosed. The end effector holds a plurality wafers with only two points of contact intruding onto the front or back surface of the wafer, holding the wafer with substantially no movement during processing at a slight angle from vertical.

REFERENCES:
patent: 3826377 (1974-07-01), Bachmann
patent: 4053294 (1977-10-01), Sullivan
patent: 4471716 (1984-09-01), Milliren
patent: 4493418 (1985-01-01), Johnson
patent: 4515104 (1985-05-01), Lee
patent: 4566839 (1986-01-01), Butler
patent: 4687097 (1987-08-01), Mortensen
patent: 4724963 (1988-02-01), Mortensen
patent: 4949848 (1990-08-01), Kos
patent: 4981222 (1991-01-01), Lee
patent: 5111936 (1992-05-01), Kos

Affiliated with

Also associated with

Rating

Semiconductor wafer end effector does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor wafer end effector, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor wafer end effector will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-755162