Semiconductor wafer container

Details Semiconductor wafer container Semiconductor wafer container

1995-09-18

1996-09-03

Foster, Jimmy G.

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

53449, 206445, 206499, B65D 8590

Patent

active

055515711

ABSTRACT:
A new combination container for wafers, and a retainer element to prevent movement of the wafers in the container, is described. The container has a body member with a circular base with a flat upper surface for supporting stacked wafers, and an upright arcuate member on the base that is adapted to encircle approximately 180.degree. of the stack of wafers. An enclosure member with a top and a cylindrical wall mates with the body member to enclose the upright member and a stack of wafers. A suitable means is provided to secure the body member and enclosure member together in sealed relationship. The wafer carrier of the invention improves the handling and storage of large diameter semiconductor wafers, is easier to load and unload, and can be opened and closed with a minimum of effort and a reduced probability of damaging the wafers.

REFERENCES:
patent: 4787508 (1988-11-01), Wu et al.
patent: 4804086 (1989-02-01), Grohrock
patent: 5366079 (1994-11-01), Lin et al.
patent: 5452795 (1995-09-01), Gallagher et al.
patent: 5454468 (1995-10-01), Chou et al.
patent: 5482161 (1996-01-01), Williams et al.

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