Semiconductor wafer container

Details Semiconductor wafer container Semiconductor wafer container

1985-07-10

1987-05-19

Hart, Charles

Gas separation

Combined or convertible

Involving ash tray

55527, 55528, 55DIG13, 220371, B01D 5302

Patent

active

046664793

ABSTRACT:
This invention relates to a semiconductor wafer container having an air filter for removing fine particles from air, which serves to allow air to pass through a body of the container. This causes atmospheric pressure within and without the container body to be substantially identical to each other whereby dirty air is never introduced into the container body.

REFERENCES:
patent: 2735964 (1956-02-01), Grieve et al.
patent: 3069831 (1962-12-01), Young et al.
patent: 3494113 (1970-02-01), Kinney
patent: 3950155 (1976-04-01), Komiyama
patent: 4093437 (1978-06-01), Ichihara et al.
patent: 4322385 (1982-03-01), Moetz
patent: 4350507 (1982-09-01), Greenough et al.
patent: 4487606 (1984-12-01), Leviton et al.
patent: 4594082 (1986-06-01), Catherwood
European Patent Application No. 0,069,323, published Jan. 1, 1983.
T. Shriver & Company, Inc., "Filter Media" Bulletin No. 159, 1964.

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