Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1995-04-03
1998-06-30
Karlsen, Ernest F.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324760, G01R 1073
Patent
active
057739862
ABSTRACT:
A semiconductor wafer contact system includes a sealed bladder (32) containing incompressible material. The sealed bladder (32) presses against a flexible circuit layer (28) including an array of electrical contacts (30). The bladder (32) forces the array of electrical contacts (30) against a corresponding array of device electrical contacts (12) on die (11) of a semiconductor wafer (10). The bladder (32) adapts in shape to compensate for die level and wafer level irregularities in contact height and non-parallelism. Additionally, bladder (32) ensures a constant force between membrane contacts (30) and die contacts (12), across the entire wafer (10).
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Packard Hughes Interconnect Product Brochure.
Lindsey Scott E.
Thompson Patrick F.
Vasquez Barbara
Williams William M.
Chen George C.
Karlsen Ernest F.
Motorola Inc
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