Semiconductor wafer cleaning system

Details Semiconductor wafer cleaning system Semiconductor wafer cleaning system

1997-08-07

1999-12-07

Breneman, Bruce

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

134 2, 216 99, 438906, B08B 308

Patent

active

059965959

ABSTRACT:
Semiconductor wafers are positioned in a cleaning tank and subjected to sequential flows of one or more highly diluted cleaning solutions that are injected from the lower end of the tank and allowed to overflow at the upper end. One solution comprises one part ammonium hydroxide, two parts hydrogen peroxide, and 300-600 parts deionized water together with a trace of high purity surfactant. Rinsing water is flowed through the tank after the first solution is dumped. A second solution comprises highly dilute hydrofluoric acid. A third solution is more dilute than the first solution. A fourth solution contains hydrochloric acid greatly diluted with deionized water. The cleaning tank is provided with a megasonic generator in its lower portion for selective application of megasonic energy. Quick dump valves in the tank bottom enable the solutions to be quickly dumped followed by one or more rinse steps, including a quick refill while spraying and then dumping of the rinsing water.

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