Semiconductor wafer cleaning agent and cleaning method

Details Semiconductor wafer cleaning agent and cleaning method Semiconductor wafer cleaning agent and cleaning method

2008-05-20

2008-05-20

Webb, Gregory (Department: 1796)

Cleaning compositions for solid surfaces, auxiliary compositions

Cleaning compositions or processes of preparing

For cleaning a specific substrate or removing a specific...

C252S390000, C134S001300

Reexamination Certificate

active

07375066

ABSTRACT:
A semiconductor surface cleaning agent containing a compound the molecule of which has a nitrogen atom having an unshared electron pair and used for cleaning the surface of a semiconductor on which copper wiring is provided, and a method for cleaning the surface of a semiconductor characterized by treating the surface of a semiconductor on which copper wiring is provided with such a cleaning agent. The cleaning agent does not corrode the copper wiring (copper thin film) on the semiconductor and SiO2of the interlayer insulating film, does not impair the flatness of the surface, and is effective in removing CuO and particles adhering to the surface of the Cu-CMP step.

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