Semiconductor wafer cassette positioning and detection mechanism

Details Semiconductor wafer cassette positioning and detection mechanism Semiconductor wafer cassette positioning and detection mechanism

1999-01-07

1999-10-26

Fulton, Christopher W.

Geometrical instruments

Gauge

Collocating

33533, 33645, 414935, 414936, 414940, B65G 4907

Patent

active

059706210

ABSTRACT:
An apparatus for detecting the presence of a wafer cassette, or pod, resting on an arrangement of pins allows cassette detection without interfering with insertion of a robotic paddle arm beneath the cassette to remove it for transport. A cassette resides on an arrangement of beveled pins which mate with corresponding receptacles on the underside. Pins supporting the cassette have a spring biased, hollow outer cylinder coaxially mounted around a center post. A cassette placed on the pins displaces the outer cylinder downward a sufficient distance to trigger a sensor. Upon removal of the cassette, the outer cylinder is displaced upwards, resetting the sensor.

REFERENCES:
patent: 4805316 (1989-02-01), Curti
patent: 5138772 (1992-08-01), Barnes
patent: 5610102 (1997-03-01), Gardopee et al.
patent: 5645391 (1997-07-01), Ohsawa et al.
patent: 5733024 (1998-03-01), Slocum et al.

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