Semiconductor wafer carrier with automatic ring extension

Details Semiconductor wafer carrier with automatic ring extension Semiconductor wafer carrier with automatic ring extension

1999-09-15

2000-08-22

Bueker, Richard

Abrading

Machine

Rotary tool

451287, 451388, 156345, B24B 2900, B24B 4700

Patent

active

061063797

ABSTRACT:
A carrier assembly includes an internal pressurized fluid circuit applying positioning forces to a ring extension. Also included is an internal diaphragm having a flexible portion providing gimbal action for the carrier assembly. The pressure between the diaphragm and a pressure plate changes the surface curvature of the pressure plate in a controlled manner. An automatic ring extension is also provided.

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