Material or article handling – Device for emptying portable receptacle – Nongravity type
Patent
1986-05-16
1988-02-02
McCall, James T.
Material or article handling
Device for emptying portable receptacle
Nongravity type
414403, 414786, B65B 2102
Patent
active
047226595
ABSTRACT:
Semiconductor wafers in plastic cassettes are loaded into (and later unloaded from) an input/output station serving a CVD furnace and thereafter the cassettes are non-manually transported by a programmable elevator to and from a flat-finder, a wafer transfer machine (where the wafers are transferred to a boat) and in-process storage. The boats are non-manually transported by a second programmable elevator to and from the wafer transfer machine, in-process boat storage and a boat loader (or process chamber directly). The cassettes can be loaded or unloaded while one or both of the elevators are operating. Up to eight human assisted steps are reduced to only two such steps.
Furnaces having more than one processing chamber have a loading station, in-process cassettes and boat storage and boats dedicated to each processing chamber so that there is no cross contamination between processing chambers caused by the boats and the cassettes in which wafers are delivered to the process are the same cassettes in which process wafers are returned to the input/output station so that there is no cross contamination of the wafers caused by the cassettes.
REFERENCES:
patent: 4466766 (1984-08-01), Geren et al.
patent: 4568234 (1986-02-01), Lee et al.
patent: 4597708 (1986-07-01), Wheeler et al.
patent: 4603897 (1986-08-01), Foulke et al.
patent: 4611966 (1986-09-01), Johnson
patent: 4643629 (1987-02-01), Takahashi et al.
Goldman Jon C.
Hoyt, III Hazen L.
Mello William R.
Sanders John D.
McCall James T.
Thermco Systems, Inc.
Valentine James C.
Williamson John K.
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