Semiconductor wafer carrier mapping sensor

Details Semiconductor wafer carrier mapping sensor Semiconductor wafer carrier mapping sensor

2006-08-22

2006-08-22

Harvey, Minsun Oh (Department: 2828)

Coherent light generators

Particular beam control device

Optical output stabilization

C372S029014, C250S559400, C250S559470

Reexamination Certificate

active

07095763

ABSTRACT:
An improved laser-based wafer carrier mapping sensor is provided. The sensor includes a number of improvements including laser source improvements; optical improvements; and detector improvements. Laser source improvements include the type of laser sources used as well as the specification of size and power of such sources. Optical improvements include features that intentionally defocus the laser stripe on the wafer as well as additional features that help ensure precision stripe generation. Detector improvements include increasing gain while decreasing the effects of ambient light. Various combinations of these features provide additional synergies that facilitate the construction of a sensor with significantly improved dynamic response while decreasing the frequency of false cross slot errors.

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