Semiconductor wafer carrier input/output drawer

Details Semiconductor wafer carrier input/output drawer Semiconductor wafer carrier input/output drawer

1986-05-16

1990-06-19

Falk, Joseph

Supports: cabinet structure

With movable components

Horizontally movable

211 15, 312319, A47F 300

Patent

active

049347675

ABSTRACT:
Plastic cassettes carrying semiconductor wafers are loaded into and/or unloaded from an extended open drawer. The drawer is retractable to a closed position in a frame where the cassettes may be removed from or returned to the drawer by a programmable elevator. The frame may have several drawers and cassettes may be safely loaded into or unloaded from the open drawer while cassettes are being removed from or returned to a closed drawer.

REFERENCES:
patent: 736449 (1903-08-01), Shanklin et al.
patent: 827050 (1906-07-01), Weston
patent: 1137073 (1915-04-01), Morris
patent: 3730358 (1973-05-01), Oji
patent: 4269461 (1981-05-01), Roach

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