Semiconductor wafer carrier having the same composition as the w

Details Semiconductor wafer carrier having the same composition as the w Semiconductor wafer carrier having the same composition as the w

1998-12-09

2000-05-02

Foster, Jim

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

206454, 2065246, 211 4118, 118500, B65D 8590

Patent

active

060561238

ABSTRACT:
The described embodiments of the present invention provide a wafer boat that is manufactured using polysilicon. A further embodiment of the invention is a mechanical boat manufacturing technique which avoids the use of welding and other forms of bonding. Another embodiment of the present invention is a polysilicon wafer boat that is formed with a plurality of spaced parallel rods having slots for supporting a series of semi-conductor wafers in a generally edgewise, spaced, parallel position. The rods are mechanically held in place at each end by a plate and capturing mechanism. In yet another embodiment of the invention, polysilicon rods are machined to a tight tolerance with openings in end pieces of the boat. The rods are held firmly in place by polysilicon wedges. This makes for a very rigid structure. If so desired, the boat can then be coated with a layer of polysilicon in a furnace to better lock the parts together.

REFERENCES:
patent: 3951587 (1976-04-01), Alliegro et al.
patent: 4093201 (1978-06-01), Dietze et al.
patent: 4318749 (1982-03-01), Mayer
patent: 4966549 (1990-10-01), Ohdate
patent: 5468297 (1995-11-01), Letort
patent: 5488558 (1996-01-01), Watanabe et al.
patent: 5538230 (1996-07-01), Sibley

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