Semiconductor wafer carrier having a dust cover

Details Semiconductor wafer carrier having a dust cover Semiconductor wafer carrier having a dust cover

1992-04-20

1994-01-11

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437925, 118500, 211 41, H01L 2168, H01L 21306

Patent

active

052781046

ABSTRACT:
A semiconductor device support carrier used for a liquid phase process of a semiconductor device with a process liquid is disclosed. The semiconductor device support carrier comprises a support frame supporting the semiconductor device, and a dust protection plate mounted on the support frame and positioned above the semiconductor device. When the semiconductor device support carrier is drawn up from the process liquid, dust in the process liquid is pushed aside and out of the semiconductor device by the dust protection plate.

REFERENCES:
patent: 3964957 (1976-06-01), Walsh
patent: 4676008 (1987-06-01), Armstrong
patent: 4696395 (1987-09-01), Rivoli
R. C. Guggenheim, Sr., et al.; IBM Technical Disclosure Bulletin, vol. 20, No. 6 Nov. 1977, p. 2205.
Hustis, et al., "Mask Transportation and Storage Container", IBM Technical Disclosure Bulletin, vol. 14, No. 8, Jan. 1972, p. 2317.

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