Special receptacle or package – Holder for a removable electrical component – For a semiconductor wafer
Patent
1997-01-23
1999-03-09
Sewell, Paul T.
Special receptacle or package
Holder for a removable electrical component
For a semiconductor wafer
206454, 211 41, B65D 7302
Patent
active
058788891
ABSTRACT:
A wafer carrier for transporting a plurality of wafers includes a pair of end panels provided In parallel with each other at opposite sides of the wafer carrier. The wafer carrier further includes a wafer supporter for supporting the plurality of wafers. The wafer supporter has two opposite side walls in parallel with each other and extending in a direction normal to the pair of end panels. Each of the side walls has two end portions respectively secured to the two end panels. The wafer supporter has a plurality of grooves which are provided, at predetermined intervals, on an inner surface thereof in parallel with one another and In parallel with the two end panels. The grooves support corresponding semiconductor wafers at their peripherals. One groove, nearest to one of the two end panels, is separated from the one of the end panels by a distance selected to minimize the number of airborne particles which become attached to a surface of a wafer facing the end panel.
REFERENCES:
patent: 5255783 (1993-10-01), Goodman et al.
patent: 5273159 (1993-12-01), Gregerson
patent: 5586658 (1996-12-01), Nyseth
Lam Nhan T.
NEC Corporation
Sewell Paul T.
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