Semiconductor wafer carrier design

Details Semiconductor wafer carrier design Semiconductor wafer carrier design

1990-12-19

1991-12-24

Olszewski, Robert P.

Material or article handling

Movable rack having superposed, charge-supporting elements,...

Rack moved vertically by elevating means

118500, 19880301, 206454, 414160, B65G 100

Patent

active

050747363

ABSTRACT:
A carrier-susceptor for use in a continuous chemical vapor deposition reactor system serves as a carrier, cover and heat susceptor for a semiconductor wafer being processes through the reactor system.

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