Semiconductor wafer carrier

Details Semiconductor wafer carrier Semiconductor wafer carrier

1997-08-13

2000-07-18

Foster, Jim

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

118500, 206832, 211 4118, B05C 1302

Patent

active

06089377&

ABSTRACT:
The invention provides a boat-type semiconductor wafer carrier which prevents such a situation that, upon wet processing of semiconductor wafers, the wafers carried thereon are displaced from grooves thereof and inclined until they fall down or contact with each other to break themselves or damage the surfaces of them. A holding member for holding down upper portions of the wafers is mounted on the boat-type carrier, and the wafer holding member is removable from the boat-type carrier, and is mounted onto the boat-type carrier to fix the wafers aligned on the boat-type carrier. Transportation of the wafers between processing tanks is performed by transporting the boat-type carrier on which the wafers are carried.

REFERENCES:
patent: 3934733 (1976-01-01), Worden
patent: 4676008 (1987-06-01), Armstrong
patent: 4872554 (1989-10-01), Quernemoen
patent: 4966549 (1990-10-01), Ohdate
patent: 5000795 (1991-03-01), Chung et al.
patent: 5054418 (1991-10-01), Thompson et al.
patent: 5379785 (1995-01-01), Ohmori et al.
patent: 5672212 (1997-09-01), Manos

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