Material or article handling – Chamber of a type utilized for a heating function and... – Charging of chamber
Patent
1986-06-30
1988-01-26
Werner, Frank E.
Material or article handling
Chamber of a type utilized for a heating function and...
Charging of chamber
403353, 432242, B65G 2500
Patent
active
047214244
ABSTRACT:
A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube. The control system employs a self-teaching technique that permits rapid reprogramming of the carriage travel limits which may be required when the paddle is replaced by a paddle of a different type or length.
REFERENCES:
patent: 2549110 (1951-04-01), Michael
patent: 3410547 (1968-11-01), Bielefeldt
patent: 3911813 (1975-10-01), Schaeffer
patent: 4003714 (1977-01-01), Foglino et al.
patent: 4440538 (1984-04-01), Bowers
patent: 4468195 (1984-08-01), Sasaki et al.
patent: 4671726 (1987-06-01), Thuen
Aldridge Robert E.
Elloway Russell
Fritz William O.
Goff Ralph D.
Herrera Michael J.
Millman Stuart J.
Thermco Systems, Inc.
Valentine James C.
Werner Frank E.
Williamson John K.
LandOfFree
Semiconductor wafer boat loader releaseable mounting does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Semiconductor wafer boat loader releaseable mounting, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor wafer boat loader releaseable mounting will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1466237