Semiconductor wafer boat loader control system

Electricity: motive power systems – Positional servo systems – Pulse-width modulated power input to motor

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Details

318341, G05B 1128

Patent

active

046848630

ABSTRACT:
A soft landing cantilever boat loader for loading semiconductor wafer carrying boats into a furnace process tube includes a loading station having one or more loading assemblies, an automatically controlled door associated with each loading assembly for selectively closing an end of the process tube and a microcomputer based control system for controlling and coordinating process operations. The loading assemblies are of a low profile configuration and each include a boat supporting, cantilevered paddle that is mounted by a quick release mechanism on a carriage which is driven along ways by a motor. A motor speed control circuit provides closed loop motor speed using a pulse width modulated motor drive. A door operating mechanism provides movement of the door along two transverse axes to assure tight sealing of the door against the tube. The control system employs a self-teaching technique that permits rapid reprogramming of the carriage travel limits which may be required when the paddle is replaced by a paddle of a different type or length.

REFERENCES:
patent: 3751940 (1973-08-01), Norbeck
patent: 4368411 (1983-01-01), Kidd
patent: 4463435 (1984-07-01), Cavill
patent: 4516059 (1985-05-01), Roberts et al.
patent: 4523134 (1985-06-01), Kinoshita

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