Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor – With peripheral feature due to separation of smaller...
Reexamination Certificate
2001-07-30
2003-07-08
Elms, Richard (Department: 2824)
Active solid-state devices (e.g., transistors, solid-state diode
Physical configuration of semiconductor
With peripheral feature due to separation of smaller...
C257S797000, C438S462000
Reexamination Certificate
active
06590274
ABSTRACT:
FIELD OF THE INVENTION
The present invention relates to a method for manufacturing semiconductor devices, and particularly, the present invention relates to a semiconductor wafer and to method for dividing a semiconductor wafer which is covered by an opaque resin in a dicing process.
BACKGROUND OF THE INVENTION
A method has been proposed for the manufacture semiconductor devices which includes a step of covering a semiconductor wafer with a resin before a step of separating the semiconductor devices from a semiconductor wafer.
An example is disclosed in “NIKKEI MICRODEVICES, pp. 164-167”, published on April, 1998. However, in a step of separating semiconductor chips from a semiconductor wafer which is covered by a resin according to the publication, it is difficult to precisely identify cutting points since a surface of the semiconductor wafer is covered by an opaque resin.
SUMMARY OF THE INVENTION
An object of this invention is to provide a method for manufacturing in which is possible to recognize grid lines which are hidden by an opaque resin.
To achieve the object, one aspect of the invention includes a stop of forming marks on a semiconductor wafer, wherein the marks are distinguished from electrodes which are formed on the semiconductor wafer.
According to the invention, in a dicing process, separating semiconductor chips from the semiconductor wafer can be precisely achieved. That is, it is possible to realize a manufacturing process of good quality.
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Nikkei Microdevices, pp. 164-167, Apr. 1998.
Kato Yuzo
Ohsumi Takashi
Elms Richard
Oki Electric Industry Co. Ltd.
Volentine & Francos, PLLC
Wilson Christian D.
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