Semiconductor wafer and epitaxial growth on the semiconductor wa

Details Semiconductor wafer and epitaxial growth on the semiconductor wa Semiconductor wafer and epitaxial growth on the semiconductor wa

1988-07-01

1990-05-15

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437228, 437946, 148 333, 148DIG161, H01L 2120

Patent

active

049258095

ABSTRACT:
A semiconductor wafer on which silicon or the like is epitaxially grown and p-type or n-type impurities are doped and which has at the rear surface except for the peripheral edge portion thereof a blocking film for preventing jumping out of impurities therefrom which causes auto-doping, thereby preventing silicon particles from being produced at the peripheral surface and preventing the semiconductor wafer from being contaminated by the silicon particles during the manufacturing of a semiconductor device.

REFERENCES:
patent: 3313661 (1967-04-01), Blake
patent: 3503798 (1970-03-01), Yoshioka et al.
patent: 3769104 (1973-10-01), Ono
patent: 3795554 (1974-03-01), Tarn
patent: 3896254 (1975-07-01), Berkner
patent: 3934060 (1976-01-01), Burt et al.
patent: 4279947 (1981-07-01), Goldman et al.
patent: 4344260 (1982-08-01), Ogiwara
patent: 4395438 (1983-07-01), Chiang
patent: 4428975 (1984-01-01), Dahm et al.
patent: 4431710 (1984-02-01), Lifshin et al.
patent: 4630093 (1986-12-01), Yamaguchi et al.
patent: 4687682 (1989-08-01), Koze
"Semiconductor Silicon Manufacturing and Machining Using Diamond Tools", G, Janus, Burghausen.

Affiliated with

Also associated with

Rating

Semiconductor wafer and epitaxial growth on the semiconductor wa does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor wafer and epitaxial growth on the semiconductor wa, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor wafer and epitaxial growth on the semiconductor wa will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-621465