Semiconductor wafer

Details Semiconductor wafer Semiconductor wafer

1991-08-16

1992-09-15

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

148DIG115, H01L 21304

Patent

active

051478242

ABSTRACT:
A semiconductor wafer having a mark indicating a specified crystal orientation is disclosed. In a preferred embodiment, first and second notches are provided on a circular outer periphery of the semiconductor wafer. A line coupling the vertices of the first and second notches indicates the crystal orientation of the semiconductor wafer. By using such notches as marks for identifying the crystal orientation, the loss of useful area of the semiconductor wafer can be reduced. Generation of slip lines which are crystal defects can be suppressed. Such notches can be formed on the bar member before slicing. By providing the notches on the bar member before individual wafers are cut therefrom, it becomes unnecessary to provide notches on the individual semiconductor wafers one by one.

REFERENCES:
patent: 4127960 (1978-12-01), Hoshi et al.
patent: 4783225 (1988-11-01), Maejima et al.

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