Semiconductor variable capacitance pressure transducer assembly

Details Semiconductor variable capacitance pressure transducer assembly Semiconductor variable capacitance pressure transducer assembly

1979-09-04

1981-07-07

Goldberg, E. A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73724, 361405, H01G 500

Patent

active

042778140

ABSTRACT:
A capacitive pressure transducer assembly having a semiconductor transducer device, a substrate, and a cover for use in conducting a fluid pressure to be sensed to the exterior surfaces of the transducer device. The transducer device may have a glass, silicon or other nonconductive material as a base on which a metal capacitor plate is formed. The other capacitor plate may be formed of doped silicon or other semiconductor material. Also, the substrate on which the transducer device is mounted may have additional and related circuitry implemented in thick film technology (ceramic substrate) or integrated circuit technology (semiconductor substrate).

REFERENCES:
patent: 3456159 (1969-07-01), Davis
patent: 3619742 (1971-11-01), Rud
patent: 3748571 (1973-07-01), Kurtz
patent: 3780352 (1973-12-01), Redwanz
patent: 3808480 (1974-04-01), Johnston
patent: 3858097 (1974-12-01), Polye
patent: 4128006 (1978-12-01), Grabow
Marx, "First Production Automotive Capacitive Pressure Sensor", in Measurements & Contol 6/78, pp. 114-117.

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