Measuring and testing – Volume or rate of flow – Thermal type
Patent
1986-03-21
1987-07-07
Goldstein, Herbert
Measuring and testing
Volume or rate of flow
Thermal type
G01F 168
Patent
active
046778500
ABSTRACT:
In a semiconductor-type flow rate detecting apparatus, a casing arranged in the fluid path includes first and second semiconductor chips. The first semiconductor chip has a first temperature detector. The second semiconductor chip arranged in proximity to the first semiconductor chip has a heater and a second temperature detector.
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Hattori Tadashi
Iwasaki Yukio
Kanehara Kenji
Kohama Tokio
Miura Kazuhiko
Goldstein Herbert
Nippon Soken Inc.
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