Semiconductor type differential pressure measurement apparatus a

Details Semiconductor type differential pressure measurement apparatus a Semiconductor type differential pressure measurement apparatus a

1993-08-24

1994-12-27

Chilcot, Jr., Richard E.

Measuring and testing

Fluid pressure gauge

Diaphragm

73721, 73706, 338 4, G01L 904

Patent

active

053754735

ABSTRACT:
A semiconductor type differential pressure measurement apparatus is disclosed comprising a measuring diaphragm having its periphery fixed, and two measuring chambers, each having a predetermined spacing along both surfaces of the measuring diaphragm, and which detects differential pressure within allowable limits of measurement. When an overpressure is applied, the diaphragm is stopped by a wall of a measuring chamber to prevent the diaphragm from being damaged by overpressure, so that no additional mechanism is required to prevent damage from overpressure. One embodiment utilizes an additional chamber and overhang to reduce overpressure. Another embodiment utilizes a measuring chamber having the two sides of the diaphragm exposed to the ambient to eliminate need for a pressure resistant casing. In a further embodiment, injected impurities serve as a terminal.

REFERENCES:
patent: 4782319 (1988-11-01), Dell'Acqua et al.
patent: 5174158 (1992-12-01), Kremidas
patent: 5257546 (1993-11-01), Tobita et al.

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