Semiconductor transducer or actuator utilizing corrugated suppor

Details Semiconductor transducer or actuator utilizing corrugated suppor Semiconductor transducer or actuator utilizing corrugated suppor

1989-04-07

1991-11-12

Michalsky, Gerald A.

Valves and valve actuation

Fluid actuated or retarded

Flexible wall expansible chamber reciprocating valve actuator

92103R, 92104, 251368, F16K 31126

Patent

active

050641654

ABSTRACT:
A semiconductor transducer or actuator is disclosed. The transducer and actuator each include a deflecting member with corrugations producing increased vertical travel which is a linear function of applied force. An accurate and easily controlled method that is insensitive to front-to-back alignment is also disclosed for forming uniform corrugations of precise thickness; independent of the thickness of the deflecting member. The cross-sectional shape of the corregations is not limited by the etching technique, so that any configuration thereof is enabled.

REFERENCES:
patent: 1767201 (1930-06-01), Boynton
patent: 3965746 (1976-06-01), Rabek
patent: 4218959 (1980-08-01), Numaguchi et al.
patent: 4236137 (1980-11-01), Kurtz et al.
patent: 4467656 (1984-08-01), Mallon et al.
patent: 4628576 (1986-12-01), Giachino et al.
patent: 4647013 (1987-03-01), Giachino et al.
patent: 4726879 (1988-02-01), Bondur et al.
patent: 4756508 (1988-07-01), Giachino et al.
patent: 4768751 (1988-09-01), Giachino et al.
patent: 4809589 (1989-03-01), Bertrand
patent: 4812199 (1989-03-01), Sickafus
patent: 4869282 (1989-09-01), Sittler et al.
patent: 4905575 (1990-03-01), Knecht et al.

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