Electrical transmission or interconnection systems – Nonlinear reactor systems – Parametrons
Patent
1984-06-04
1987-07-14
James, Andrew J.
Electrical transmission or interconnection systems
Nonlinear reactor systems
Parametrons
73777, 307278, H01L 2984, G01B 716
Patent
active
046806067
ABSTRACT:
A semiconductor transducer (10) including a substrate having a well (18) formed in one surface thereof and a semiconductor layer (14) having a first surface (26) bonded to the substrate about the periphery of the well to form a diaphragm (30) and a second surface (28) which is substantially coplanar to the first surface and has a pedestal (16) projecting therefrom which is disposed above the well. The side walls (32) of the pedestal are substantially orthogonal to the second surface of the semiconductor layer. Means (34) are provided for sensing the deflection of the diaphragm as a function of force applied to the pedestal. The substrate includes protrusions (38) which extend upward from the bottom of the well to limit the deflection of the diaphragm.
REFERENCES:
patent: 4079508 (1978-03-01), Nunn
Allen Henry V.
Knutti James W.
Kowalski Carl R.
Petersen Kurt E.
James Andrew J.
Prenty Mark
Tactile Perceptions, Inc.
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