Semiconductor thin film and semiconductor device

Details Semiconductor thin film and semiconductor device Semiconductor thin film and semiconductor device

1998-07-22

2000-07-11

Meier, Stephen D.

Active solid-state devices (e.g., transistors, solid-state diode

Non-single crystal, or recrystallized, semiconductor...

Non-single crystal, or recrystallized, material containing...

257 66, H01L 2904, H01L 31036

Patent

active

060876794

ABSTRACT:
After an amorphous semiconductor thin film is crystallized by utilizing a catalyst element, the catalyst element is removed by performing a heat treatment in an atmosphere containing a halogen element. A resulting crystalline semiconductor thin film exhibits {110} orientation. Since individual crystal grains have approximately equal orientation, the crystalline semiconductor thin film has substantially no grain boundaries and has such crystallinity as to be considered a single crystal or considered so substantially.

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