Refrigeration – Using electrical or magnetic effect – Thermoelectric; e.g. – peltier effect
Patent
1997-11-18
1999-10-19
Bennett, Henry
Refrigeration
Using electrical or magnetic effect
Thermoelectric; e.g., peltier effect
62 37, 165 61, F25B 2102, F25B 2900
Patent
active
059669403
ABSTRACT:
An apparatus for thermally conditioning a semiconductor unit is provided which includes a surface plate for receiving the semiconductor unit thereon which is connected to a thermoelectric device and a closed loop heat exchanger. At least one temperature sensor is disposed adjacent the surface plate for sensing the temperature of the surface plate. The thermoelectric device has first and second sides with the first side disposed against the surface plate. The closed loop heat exchanger is coupled to the second side of the thermoelectric device. The closed loop heat exchanger includes a chamber or cavity having an inlet and an outlet with the chamber disposed adjacent the second side of the thermoelectric device. The closed loop heat exchanger further includes conduit connected to the inlet and outlet of the chamber and a heat transfer unit connected to the conduit opposite the chamber. Heat transfer fluid is contained within the closed loop heat exchanger and a pump is provided for pumping the heat transfer fluid through the closed loop heat exchanger wherein the heat transfer unit transfers heat to or from the heat transfer fluid to control the temperature of the heat transfer fluid. The thermoelectric device transfers heat to or from the surface plate to thermally condition the semiconductor unit disposed on the surface plate while the closed loop heat exchanger transfers heat to or from the second side of the thermoelectric device which increases the range of temperature under which the semiconductor unit may be thermally conditioned.
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Frost Kevin
Gower Roger
Guthrie J. Cameron
Kingery John
Miller Steve
Bennett Henry
Jones Melvin
Micro Component Technology, Inc.
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