Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Reexamination Certificate
2002-12-18
2003-09-02
Cuneo, Kamand (Department: 2829)
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
C324S765010
Reexamination Certificate
active
06614222
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
The invention relates to a testing apparatus, and more particularly to a semiconductor testing apparatus for testing semiconductor devices.
2. Description of the Related Art
With the development of the automation, speed and human factor considerations of semiconductor testing apparatus, the design considerations of semiconductors are getting more and more complicated. Therefore, various testing apparatus are required.
Referring to
FIG. 1
, a conventional semiconductor testing apparatus
1
includes a server
11
, a robot arm
12
, a gearing unit
13
, a hand-actuated unit
14
, a transmission unit
15
and a testing head
16
.
The server
11
collects and processes tested data. The robot arm
12
has a first end pivotally mounted to the server
11
and a second end opposite to the first end. The second end has a front side mounted with a connection board
12
and an underside mounted with a support member
122
. The support member
122
has a fixing member
123
vertically mounted to one side.
The gearing unit
13
is mounted to the support member
122
and is provided with a first transmission shaft and a second transmission shaft (not shown), both of which extend in different directions.
The hand-actuated unit
14
is mounted on the fixing member
123
and is connected to the first transmission shaft of the gearing unit
13
so as to actuate the first transmission shaft.
The transmission unit
15
is provided with a first rotation member
151
, a second rotation member
152
and a connection member
153
. The first rotation member
151
is axially mounted to the connection board
121
, the second rotation member
152
is connected to the second transmission shaft of the gearing unit
13
, and the connection member
153
is used to connect the first rotation member
151
to the second rotation member
152
.
The testing head
16
is electrically connected to the server
11
and mounted to the connection board
121
on the front side of the robot arm
12
. The first rotation member
151
may drive the testing head
16
to rotate. When a user rotates the handle
141
of the hand-actuated unit
14
, power from the hand-actuated unit
14
is transmitted to the second transmission shaft through the first transmission shaft of the gearing unit
13
, and the second rotation member
152
on the second transmission shaft may rotate accordingly. Then, the power transmission of the connection member
153
may rotate the first rotation member
151
, which may then drive the testing head
16
to rotate.
However, because a typical testing head has a predetermined weight of, for example, 350 to 800 KG, it is laborious and time-consuming to manually rotate the hand-actuated unit
14
in order to move the testing head
16
from a testing position to a loading/unloading position; it takes about two minutes to complete the process. In addition, in order to satisfy the flexibility requirement of the semiconductor testing apparatus, the testing head has to be frequently changed and rotated, which is a great burden for the tester who operates the semiconductor testing apparatus. Furthermore, when the tester rotates the handle
141
, the testing head
16
tends to frequently seize up due to the rotation of the testing head
16
, and the tester may be hurt. In addition, since the semiconductor testing apparatus is manually operated, the development of industry wide automation and speed requirements cannot be satisfied.
Therefore, it is an important subject of the invention to satisfy the automation, speed, human factor and flexibility requirements of the semiconductor testing apparatus, and allow the testing head to quickly and precisely reach the desired testing position and loading/unloading position.
SUMMARY OF THE INVENTION
In view of the above-mentioned problems, an objective of the invention is to provide a semiconductor testing apparatus, which is timesaving and laborsaving.
The invention is characterized in utilizing a drive unit to drive a gearing unit and a transmission unit and thus to rotate the testing head. In addition, a control unit is utilized to control the driving speed and driving direction of the drive unit so as to control the rotation speed and rotation direction of the testing head.
To achieve the above-mentioned objective, the invention provides a semiconductor testing apparatus including a server, a robot arm, a gearing unit, a drive unit, a transmission unit, a control unit and a testing head.
The robot arm has a first end pivotally mounted to the server and a secondend opposite to the first end. The second end has a front side mounted with a connection board and an underside mounted with a support member. The support member has one side to which a fixing member is vertically mounted.
The gearing unit is mounted to the support member and includes a first transmission shaft and a second transmission shaft, both of which extend in different directions.
The drive unit is mounted to the fixing member and connected to the first transmission shaft of the gearing unit to drive the first transmission shaft.
The transmission unit includes a first rotation member axially mounted to the connection board, a second rotation member connected to the second transmission shaft of the gearing unit, and a connection member for connecting the first rotation member to the second rotation member.
The control unit is mounted to the fixing member and electrically connected to the drive unit to control a rotation speed and a rotation direction of the drive unit. The testing head is mounted to the connection board on the front side of the robot arm and electrically connected to the server. The testing head is capable of rotating as the first rotation member rotates. When the drive unit is started, power from the drive unit is transmitted to the second transmission shaft through the first transmission shaft of the gearing unit, the second rotation member on the second transmission shaft rotates accordingly, and the connection member functions to rotate the first rotation member and thus the testing head.
As mentioned above, since the semiconductor testing apparatus of the invention utilizes a control unit to control the drive unit, introduce the power to the gearing unit and the transmission unit, and cause the testing head to operate and rotate, it is possible to make the semiconductor testing apparatus automatic, timesaving and laborsaving, and prevent the tester from being hurt.
REFERENCES:
patent: 5708222 (1998-01-01), Yonezawa et al.
patent: 6218852 (2001-04-01), Smith et al.
Jang Ching-Yuh
Tsai Shou-nan
Yu Cheng-ji
Cuneo Kamand
Nguyen Jimmy
Silicon Integrated Systems Corp.
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