Measuring and testing – Probe or probe mounting
Patent
1997-07-11
1999-12-28
Raevis, Robert
Measuring and testing
Probe or probe mounting
G01D 2100
Patent
active
060066164
ABSTRACT:
A semiconductor tester includes a support frame and a test head assembly mounted to the support frame for vertical movement relative thereto. A counterbalance assembly also is mounted to the support frame for vertical movement relative thereto. A force transmission member interconnects the test head assembly and the counterbalance assembly, whereby upward movement of the test head assembly is accompanied by downward movement of the counterbalance assembly and downward movement of the test head assembly is accompanied by upward movement of the counterbalance assembly. A force sensing transducer which is coupled to the test head assembly develops an output signal dependent on an external effort applied to the test head assembly to cause vertical movement thereof in a selected direction. A force amplifier is responsive to the output signal of the force sensing transducer and has an output member coupled drivingly to at least one of the assemblies for applying a force thereto dependent on and assisting the external effort applied to the test head.
REFERENCES:
patent: 5450766 (1995-09-01), Holt
patent: 5821440 (1998-10-01), Khater et al.
Credence Systems Corporation
Raevis Robert
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