Semiconductor test unit having low contact resistance with...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element

Reexamination Certificate

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Reexamination Certificate

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10401871

ABSTRACT:
A semiconductor test unit comprises a test circuit for inputting/outputting a test signal to/from an examined electronic product, a test signal wiring electrically connected to the test circuit, a contact board electrically connected to an electrode of the examined electronic product and provided with an electrically conductive via to which the test signal is transmitted, a multilayer circuit board electrically connected to the conductive via and the test signal wiring, located under the bottom face of the contact board, and provided with at least one through-hole, and a vacuum attachment mechanism for attaching thereto and holding the examined electronic product, the contact board, and the multilayer circuit board by vacuum. The contact board is made of an insulative material, has top and bottom faces, and is provided with at least one through-hole.

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patent: 5602491 (1997-02-01), Vasquez et al.
patent: 5830565 (1998-11-01), Budnaitis
patent: 6046060 (2000-04-01), Budnaitis
patent: 6246249 (2001-06-01), Fukasawa et al.
patent: 6465742 (2002-10-01), Hiraoka et al.
patent: 55-161306 (1980-12-01), None
patent: 10-284556 (1998-10-01), None
U.S. Appl. No. 09/808,233, filed Mar. 15, 2001, Hotta et al.
U.S. Appl. No. 10/251,825, filed Sep. 23, 2002, Hiraoka et al.
U.S. Appl. No. 10/401,871, filed Mar. 31, 2003, Yamaguchi et al.
U.S. Appl. No. 10/694,776, filed Oct. 29, 2003, Hiraoka et al.

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