Semiconductor test system, semiconductor test method, method of

Details Semiconductor test system, semiconductor test method, method of Semiconductor test system, semiconductor test method, method of

1993-07-15

1995-09-26

Ramirez, Ellis B.

Excavating

324751, 324765, 364579, G06F 1100

Patent

active

054539943

ABSTRACT:
The semiconductor test system comprises an OBIC measuring device (8) and a tester (5). The tester (5) transmits a test signal to an input pad (2a) of a semiconductor integrated circuit (1). In synchronization with this, the OBIC measuring device (8) irradiates drain regions (6) of the semiconductor integrated circuit (1) with a laser beam (7) one after another, to thereby detect the generation of the OBIC. An comparator (5c) in the tester (5) compares an output signal from an output pad (2b) of the semiconductor integrated circuit (1) and an OBIC detection signal from the OBIC measuring device (8) with expected values (5b).

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Proceedings International Test Conference 1900, pp. 1035-1039, M. Shinagawa, et al., "A Pico-Second External Electro-Optic Prober Using Laser Diodes".

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