Semiconductor test system linked to cad data

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364578, 371 221, 371 24, 371 251, G01R 3128

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057400865

ABSTRACT:
A semiconductor test system for testing a semiconductor device by directly using CAD data produced for the design of the semiconductor device. The test system for applying test signals to the semiconductor device for each reference period and comparing the resulting output signal from the device under test with expected data includes: means for extracting, from CAD design data for the semiconductor device, information on terminals of the semiconductor device and waveform changes in a test vector applied to the semiconductor device, and obtaining terminal data, waveform change data, and data indicating the time of the waveform change; an event memory for storing event data indicating existence of waveform changes in the test vector with respect to the data indicating the terminals; a delay data memory for storing delay time data indicating the time when the waveform change arises as a time difference from the reference period; a waveform data memory for storing waveform data indicating the waveform change when there is a change in the waveform; means for providing address signals to each of the memories at the reference period; and a time delay circuit for adding the delay time to an output signal, read out from the event memory at the reference period, based on the delay data read out from the delay data memory.

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