Semiconductor test system having test head connection apparatus

Details Semiconductor test system having test head connection apparatus Semiconductor test system having test head connection apparatus

1995-11-22

1998-10-06

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

414590, G01R 3102

Patent

active

058182195

ABSTRACT:
A semiconductor test system having a test head connection apparatus for connecting and disconnecting a test head of the test system with a wafer prober or a test handler includes a housing formed outside of the semiconductor test system wherein the housing is integral with a body of the test system, a pair of arms provide on the housing for holding the test head wherein the test head rotates about 180 degrees in the arms so that a performance board on the test head faces with a corresponding member on the wafer prober or the test handler, at least one rail built on a floor in a direction which accurately positioning the test head right over the wafer prober or the test handler, a guide mechanism provided on the housing to guide an up-down movement of the arms, a plurality of free casters provided at the bottom of the housing to transfer the test system and the test head toward the wafer prober or the test handler along the rail, and a balancing mechanism for offsetting the weight of the test head so that the up-down movement of the arms holding the test head is controlled with substantially less power.

REFERENCES:
patent: 4527942 (1985-07-01), Smith
patent: 5241870 (1993-09-01), Holt
patent: 5606262 (1997-02-01), Montalbano et al.

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