Semiconductor surface emitting laser having enhanced optical con

Details Semiconductor surface emitting laser having enhanced optical con Semiconductor surface emitting laser having enhanced optical con

1993-02-11

1994-09-20

Breneman, R. Bruce

Fishing, trapping, and vermin destroying

437105, 437107, 437126, 437133, 372 43, 372 45, H01L 2120

Patent

active

053489128

ABSTRACT:
The present applicants have discovered that one can make a surface emitting laser with enhanced optical confinement and improved heat sinking characteristics by etching away portions of the growth layers peripheral to the intended laser cavity and regrowing peripheral regions of material having a lower index of refraction than the active region. Using low damage etching and either in situ regrowth or hydrogen plasma cleaning followed by regrowth, a surface emitting laser having enhanced optical isolation and heat sinking characteristics can be made.

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