Semiconductor supporting device

Details Semiconductor supporting device Semiconductor supporting device

1998-07-28

2000-04-18

Watkins, III, William P.

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Structurally defined web or sheet

Including aperture

428137, 428139, 428140, 428698, 279128, 264647, 264664, 264666, 264668, 118500, 269 53, 269329, 501 984, B32B 324, B32B 900

Patent

active

060513039

ABSTRACT:
A semiconductor-supporting device comprising a substrate made of an aluminum nitride-based ceramic material and having a semiconductor-placing surface, wherein an orientation degree of the aluminum nitride-based ceramic material specified by the following formula is not less than 1.1 and not more than 2.0.

REFERENCES:
patent: 4908173 (1990-03-01), Schwetz et al.
patent: 5320990 (1994-06-01), Guiton et al.
patent: 5413360 (1995-05-01), Atari et al.
patent: 5456815 (1995-10-01), Fukuyo et al.
patent: 5520785 (1996-05-01), Evans et al.
patent: 5668524 (1997-09-01), Aida et al.
patent: 5672420 (1997-09-01), Stinton et al.

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