Semiconductor substrate with islands of diamond and...

Details Semiconductor substrate with islands of diamond and... Semiconductor substrate with islands of diamond and...

2005-09-19

2008-11-11

Lebentritt, Michael S (Department: 2829)

Semiconductor device manufacturing: process

Having diamond semiconductor component

C438S121000, C438S122000, C438S455000, C257S750000, C257SE21144, C257SE23106

Reexamination Certificate

active

07449361

ABSTRACT:
Disclosed is a method of forming a substrate having islands of diamond (or other material, such as diamond-like carbon), as well as integrated circuit devices formed from such a substrate. A diamond island can form part of the thermal solution for an integrated circuit formed on the substrate, and the diamond island can also provide part of a stress engineering solution to improve performance of the integrated circuit. Other embodiments are described and claimed.

REFERENCES:
patent: 5672240 (1997-09-01), Stoner et al.
patent: 5907768 (1999-05-01), Malta et al.
patent: 6830813 (2004-12-01), Ravi

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