Semiconductor substrate transport arm for semiconductor substrat

Details Semiconductor substrate transport arm for semiconductor substrat Semiconductor substrate transport arm for semiconductor substrat

1992-05-11

1994-05-24

Huppert, Michael S.

Material or article handling

Horizontally swinging load support

Swinging about pivot

901 15, 4147445, B25J 1804

Patent

active

053142942

ABSTRACT:
A transport arm of a semiconductor substrate transport apparatus carries a semiconductor substrate both into and out of a semiconductor substrate processing chamber in each operation of the transport arm, shortening operation time and prolonging the operating life of the apparatus. First and second arms are rotatably mounted at the leading end of an extensible arm of the semiconductor substrate transport apparatus, each including a substrate holding portion at the leading end for supporting a semiconductor substrate. The first and second arms are turned by an arm driving device while in the semiconductor substrate processing chamber.

REFERENCES:
patent: 5007784 (1991-04-01), Genov et al.
patent: 5180276 (1993-01-01), Hendrickson

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